2300 Flex series
The 2300 Flex series is a Lam 12 inch dielectric film etching equipment can generally be configured with 1-6 cavities based on the platform. The equipment adopts the CCP etching principle, with higher ion concentration and stronger etching bombardment force. Suitable for deep aspect ratios.
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描述
Product Features
1.High aspect ratio etching for deep holes and grooves
2.Three RF configurations, suitable for more process options
